A study on the dielectric properties of (Sr/sub 1-x/Ca/sub x/)TiO/sub 3/ thin film

The (Sr/sub 1-x/Ca/sub x/)TiO/sub 3/(SCT) thin films are deposited on Pt-coated electrodes (Pt/TiN/SiO/sub 2//Si) using RF magnetron sputtering. The structural and dielectric properties of the SCT thin films were influenced by substitutional contents of Ca. The composition of SCT thin films was close to stoichiometry (1.081/spl sim/1.117 in A/B ratio). The maximum dielectric constant was obtained for a SCT15 thin film. The dielectric constant changes almost linearly in the temperature range -80/spl sim/+90[/spl deg/C]. The temperature properties of the dielectric loss have a stable value. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 100[kHz].