Electro-optic polymer surface-normal modulator using silicon high-contrast grating resonator

A surface-normal optical modulator using electro-optic polymer embedded inside a 570-nm-thick silicon high-contrast-grating resonator is fabricated. With a voltage applied to silicon grating, we obtain $> 20\%$ intensity modulation of the transmitted light at 30 MHz. © 2019 The Author(s)