Research on the Open Z-axis Fluidic Gyroscope based on MEMS

This paper reported the design, simulation, fabrication and performance test of fluidic gyroscope, which is fabricated by using the integration process of MEMS process of silicon wafer and high-precision laser cutting and modeling process on PMMA. The 3D transient numerical analysis based on the fluid-structure interaction was used to calculate the flow movement. Calculations and results indicate that sensitivity SFZ is 2.0μV/°/s, the nonlinearity is less than 0.5%. Open flow channel includes two inlets and one outlet inside the sensitive component. With the driving of piezoelectric pump, the fluid flows into the channel through two inlets and gathers together. The flow from the nozzle forms the sensitive jet, without a circulation flow inside the sensitive component. The sensitive component structure is simple. Sensitive jet is deflected along Z-axis by the Coriolis force, the flow exchanges heat with hotwires. Therefore, Wheatstone bridge outputs an unbalanced voltage proportional to angular velocity.