Novel on-chip high-Q power inductor for high-efficient PowerSoC Applications

In this paper, novel on-chip inductors with thick copper and thick magnetic core are designed and fabricated. With improved magnetic core lamination and thicker Cu layers, these inductors have achieved a high Q factor of 21.1 at 20MHz, as well as a high L/R
_dc
of 420nH/ohm, which is the best-known reported Q factor and L/R
_dc
for on-chip inductors of large inductances (>100nH).