Proposal of Speeding up Scheme for Pneumatic Stage

A pneumatic stage has a slow response due to large time constant of a pneumatic system and heavy stage weight of a mechanical system. Therefore, the improvement of characteristics of both systems is necessary to realize fast positioning. In this paper, pressure feedback is applied for the pneumatic system, and its time constant is reduced. Similarly, PDD
²
D
³
compensator is applied for the mechanical system, and the stage mass is electrically reduced. In addition, control of valve opening is proposed for a quick response.