A mesh generation algorithm for complex geometry [semiconductor process modelling]

A mesh generation algorithm for a curved surface is proposed to investigate a complex structure on a semiconductor substrate. This algorithm relies on the advancing front method with scattered data interpolation through a NURBS (nonuniform rational B-spline) surface. This algorithm has been applied to a cell-based simulation and a level set simulation. The NURBS mesh according to our algorithm excellently represented the surface evolution of the topography.