Appropriate initial damage conditions for "three-stream" point defect diffusion models

This paper describes progress made in modeling transient enhanced diffusion (TED) on the basis of "three-stream" point defect diffusion models. Such models show artificially high transient diffusion at temperatures below approximately 800/spl deg/C when standard initial damage conditions are used. Using appropriate conditions for the initial distribution of dopants, point defects and clusters, however, we were able to achieve surprisingly good results for TED experiments between 600/spl deg/C and 1100/spl deg/C and temperature ramp rates between 10/spl deg/C/min (furnace anneal) and 100/spl deg/C/sec (RTP) even with a "three-stream" diffusion model.