Broadband and Polarization Insensitive Surface Optical Coupler using Vertically Curved Waveguides Fabricated with ArF-Immersion Lithography | IEEE Conference Publication | IEEE Xplore
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Broadband and Polarization Insensitive Surface Optical Coupler using Vertically Curved Waveguides Fabricated with ArF-Immersion Lithography

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T. Yoshida; Y. Atsumi; E. Omoda; Y. Sakakibara
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Abstract:

Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <;2.5dB minimum coupling loss, >130nm/0.5dB...Show More

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Abstract:

Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <;2.5dB minimum coupling loss, >130nm/0.5dB spectrum bandwidth for 5μm-MFD fiber coupling in both TE- and TM-polarization with very small polarization dependence.
Published in: 2019 Optical Fiber Communications Conference and Exhibition (OFC)
Date of Conference: 03-07 March 2019
Date Added to IEEE Xplore: 25 April 2019
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Conference Location: San Diego, CA, USA
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