Toward Microwave S- and X-Parameter Approaches for the Characterization of Ferroelectrics for Applications in FeFETs and NCFETs

Ferroelectric and negative-capacitance field-effect transistors (FeFETs and NCFETs) have recently garnered great attention as devices for applications in memory and low-power logic, respectively. As these technologies are pursued, it is critical to have a variety of measurement approaches, including methods familiar to the electron-device and microwave communities that can aid in fully understanding the behavior of ferroelectrics in FeFETs and NCFETs. In this paper, we propose and show the viability of using frequency-domain electrical measurement techniques employing the well-known microwave S-parameters, and their large-signal generalization and X-parameters. Our methods provide the means to trace the intrinsic polarization versus electric-field curve of the ferroelectric, i.e., with the parasitics de-embedded, thereby showing the innate ferroelectric response, which cannot be done using conventional techniques. These methods also enable extraction of all the parameters of the Landau-Khalatnikov equation, which is commonly used to model ferroelectric behavior in FeFETs and NCFETs. This paper hence takes a useful step toward methods familiar to the electron-device community that can help to better understand and optimize FeFET and NCFET technologies.