Commercially Fabricated Low Loss Superconducting Resonators Integrated With Detectors for Frequency Domain Multiplexing Readout of Future Cosmic Microwave Background Experiments

Planned Stage-IV cosmic microwave background (CMB) experiments call for telescopes with the order of 500 000 transition edge sensor (TES) bolometers. Such large arrays would benefit from detector multiplexing, as well as miniaturization and integration of readout components. In addition, fabrication of micro-fabricated devices at a commercial foundry could potentially boost production rate and reduce overall cost. To this end, HYPRES, Inc., LBNL, and U.C. Berkeley are developing low loss, superconducting LC resonators integrated with antenna coupled TES bolometers for frequency multiplexing readout. The resonators are fabricated on the same wafer and are in the same process flow as the TES detectors, reducing size, weight, and wiring complexity of a detector module compared to the conventional design, where each component is fabricated separately. We have fabricated and tested resonators from 0.6 to 70 MHz, both as standalone devices and integrated with TES bolometers, all fabricated on 150- mm wafers. We discuss the design and fabrication of these devices and present measurements of the standalone resonators.