Tuning Y–Ba–Cu–O Focused Helium Ion Beam Josephson Junctions for Use as THz Mixers

We present Josephson junctions fabricated from high transition temperature superconductor YBa
₂
Cu
₃
O
₇
coupled to spiral THz antennas. The fabrication process involves creating a Josephson junction at the center of a superconducting bridge embedded into a THz spiral antenna using irradiation from a focused helium ion beam. For low doses of helium irradiation, the junctions have metallic barriers and operate at temperatures as high as 67 K. For higher doses of irradiation, insulator barriers are created. These devices have higher resistance but require cooling to lower temperatures (~10 K) due to smaller critical currents. Through optimization of the dose and by trimming the width of the junctions, we have created high resistance devices to improve the impedance match to a spiral antenna. Under 90-GHz radiation, we observe up to 17 Shapiro steps in the I-V curve out to approximately 3 mV at a temperature of 10 K.