High-Power, High-Linearity, Heterogeneously Integrated III–V on Si MZI Modulators for RF Photonics Systems

In this paper, heterogeneously integrated III-V on silicon (III-V/Si) Mach-Zehnder interferometer (MZI) modulators providing record results for both linearity and high-power operation are described. Devices include hybrid III-V/Si phase modulation sections in a Si MZI, and with a single-drive push-pull operation provide a spurious-free dynamic range (SFDR) as high as 112 dB·Hz
^2/3
at 10 GHz, comparable to commercial lithium niobate modulators. Optical power levels up to 100 mW into the modulator provide no degradation in device linearity, with modulators demonstrating typical SFDRs of 110 dB·Hz
^2/3
. These III-V/Si MZI modulators, using a 500-nm ``thick'' Si layer for III-V integration, demonstrate applicability for high-SFDR analog fiber-optic links without need for an erbium-doped fiber amplifier.