Development of solid surface modification technologies on the base of magnetron plasma sources in Nuclear Physics Institute of Tomsk Polytechnic University

Research was carried out aiming at development of technologies and industrial scale equipment for processing of large area sheet materials using magnetron sputtering systems (MSS). The properties of MSS with cylindrical and planar diodes, and with cathodes made from various materials, were investigated. The problems of their calculation and design, volt-ampere characteristics, emissive properties, and role of gas medium, were studied. Magnetic field parameter optimization, heat injection and thermal protection of cathodes, spatial heterogeneity of particle flow, were analyzed. Studies of deposited coating properties were carried out in parallel: rate of deposition, adhesion to substrate, optical characteristics. Optimal deposition modes for formation of technical and household mirrors, colored sheet glasses, preparation of metal, oxide, nitride and oxide-nitride coatings, were found. Multilayer optical deposition technology was worked out. In particular, hard heat preserving coatings were obtained. They are transparent in the visible optical range and reflect up to 90% in the infrared. On the basis of these results, some variants of industrial scale technologies and MSS plants were developed and manufactured.