Equipment Productivity Variability: throughput impact analysis

The scope of this paper is to describe the methodology we are using to identify the equipment where variability effects can jeopardize the overall fab performance and how to address the root causes of their productivity (e.g. number of processed wafers/day) and its related variability. In this work, we are describing some real cases related to equipment speed variability because this is one of the most difficult to identify as performance detractor and its detection helps to explore that part of the “unknown” equipment performances loss.