Slit NSOM Imaging using Nanoscale Photodetector

As part of the sensitivity evaluation of a new sensor designed for Near-field Scanning Optical Microscopy (NSOM) and for detection of evanescent waves, advanced 2D simulations have been conducted: The photodetector device, shifted across a vertically oriented Gaussian beam, itself passing through a slit set on an opaque barrier, may collect the projected light on its top subwavelength aperture. The device is silicon Schottky nanoscale diode shaped as a truncated pyramid photodetector, and sharing a subwavelength slit aperture. Using Finite Elements Method (FEM) electro-optical simulations have been conducted. These results are promising towards the fabrication of a new generation of photodetector devices.