Measurement and Simulation of On-Chip Supply Noise Induced by System-Level ESD

On-chip supply noise induced by power-on ESD is studied with the aid of on-chip monitor circuits and circuit simulation. The monitor circuits' outputs provide information about the magnitudes of the ESD-induced supply noise. The supply noise monitor circuits were implemented on a 130-nm CMOS test chip. Voltage monitor circuits record the maximum and minimum supply voltage excursions. Flip-flop monitor circuits respond to a rapid voltage change at the supply. Circuit simulation is used to validate hypotheses about how the noise spreads throughout the power delivery network.