Evaluation of Measurement Resolution for Scanning Microwave Microscopy

Here we investigated the measurement resolution of a scanning microwave microscope (SMM) based on an atomic force microscope (AFM) for the characterization of several types of sample. Then, we proposed uncertainty/accuracy evaluation of SMM systems in laboratories. Dielectric material samples with high permittivity was able to be quantitatively evaluated by SMM measurement. The SMM has been detect the difference of permittivity with uncertainty. However, possibility of evaluation is now unknown for materials with small difference of electrical characteristics. This paper presents investigation results and consideration of SMM resolution by comparing with measurement uncertainty of vector network analyzers. Here, we show SMM measurement results with uncertainty for GaN epitaxial film, Graphene films, Si-dopant multi-later film and surface mount device (SMD). As the result, SMM has capable of quantitatively measuring SMD.