An Efficient Identification Method for Dynamic Systems With Coupled Hysteresis and Linear Dynamics: Application to Piezoelectric-Actuated Nanopositioning Stages

The coupling between hysteresis and linear dynamics remains a challenge for modeling and control of piezo-actuated nanopositioning stages. A decoupling identification approach is proposed in this paper. The system is first modeled by a Bouc-Wen hysteresis model cascading a linear dynamic part. Then, a proposed direct integration method with high computational efficiency is used for the identification of the Bouc-Wen model. With the identified hysteresis parameters, a harmonic linearization method is subsequently used to estimate the actual input to the linear dynamics. Experiment results on a two degree-of-freedom nanopositioning stage demonstrate that both the rate-dependence and amplitude-dependence resulted from the coupling between the hysteresis and linear dynamics can be well predicted by the proposed approach. Compared with existing methods, the proposed approach shows advantages in terms of both model accuracy and identification efficiency.