New concepts for miniaturized MEMS based power systems

New devices and applications such as wearables, low power sensor networks, and IoT require new concepts for energy supply. In this paper energy harvesting concepts for low power applications and a new type of a chemical, chip-based energy storage system for large power applications are presented. Combining such concepts, scalable autonomous power supply can be obtained which can be monolithically integrated in Si-based microelectronic devices or microsystems.