A Numerical Analysis of Capacitors for On-Chip Energy Storage

The paper characterizes a numerical model of a condenser segment. The basic, or reference, model of the condenser structure is configured with a planar circular upper electrode. To increase the structure's capacity, we set up a 3D model of a hexagonal segment having an internal cylindrical opening for the electrode. In the numerical models, we examine the overall influence exerted by both the various materials forming the dielectric layer and the layer's thickness on the eventual capacity of the structure. The impact of the aspect ratio (the diameter and depth of the electrode) upon the resulting capacity of the condenser segment is investigated too to outline the problem comprehensively. The report also compares and evaluates the results obtained from the numerical models.