High Resolution Detector Array with On-Chip Crowding Honeycomb-Shaped Patch Operating in Sub-Millimeter Wave

Detector array with on-chip crowding honeycomb-shaped patch(CHP) is proposed for high resolution sub-millimeter wave imaging application. The proposed detector array design is focused on size reduction of antenna array to include as many pixels as possible for fixed area to obtain high resolution. Moreover, the size reduction ratio reaches up to 1/9 when the number of pixel increases to common real image level. The detector array is validated by fabrication for test samples containing 2 × 1 pixels using CMOS 65 nm technology and responsivity measurement shown in Fig. 1(b). The result shows that the designed array system operate well in spite of closely spaced adjacent pixel, offering 18 GHz of 3-dB responsivity bandwidth centered at 320 GHz which is about 70% wider bandwidth compared to standard patch pixel.