Response Analysis of a 2D MEMS Electromagnetically Driven Micro-Mirror

As a MEMS actuator device, the 2D micro-mirror works in two resonant modes to realize biaxial deflection in light detection and ranging (LiDAR) system. By Changing the exit angle of the incident laser, the three-dimensional information of a space object can be received. This paper researches on the response problem of one kind of 2D electromagnetically driven micro-mirror by numerical analysis and finite element analysis method. The aim of response analysis is to obtain the angle matching of biaxial deflection under a certain proportional driving force. The dynamic model of the mirror was established firstly. Then, a numerical method called Newmark-β method was used to design optimized structure and simulate time domain response of the mirror. The ratio of slow to fast axis angle is 5.156:1 when taking the damping factor into account. The finite element analysis was carried out to further verify the results of the response analysis. By frequency domain response experiment, the ratio of slow and fast angle was 5.04:1, which confirmed the angle matching relationship of slow and fast axis near resonant frequency.