Stress Sensitivity of Micromachined AT-Cut Quartz Resonators Characterized Using Magnetostrictive Metglas Films

In this paper, stress sensitivity of micromachined A T -cut quartz cantilevers has been characterized by integrating micromachined AT-cut quartz cantilever-resonators with a magnetostrictive Metglas® 2605SAl thin film. The magnetostrictive material's properties were characterized by quantifying the dss-coefficient of the deposited films by the measurement of the out-of-plane deflection of the micro machined Metglas®-quartz unimorph cantilevers, using a laser Doppler vibrometer, as a function of applied magnetic field. The impedance characteristics at the bulk acoustic wave resonance of the quartz cantilever-resonator as a function of the applied magnetic field has also been characterized independently. Through these two measurements, quartz cantilever-resonators can be deduced to exhibit a sensitivity of ~ 6.4 Hz/kPa of the film stress.