CO2 Gas Sensor Based on BaTiO3Thin Film Deposited via Ultrasonic Spray

A new approach for thin layer deposition to elaborate CO
2
sensitive layers is demonstrated in this work. BaTiO
3
was used as CO
2
sensitive materials and SnO
2
as a reference as well as to enhance the resistance of BaTiO
3
film. BaTiO
3
solution was elaborated by the dispersion of commercial nano-powder in ethanol. A simple sol-gel in ethanol was used to synthesize SnO
2
precursor. Sn02 and BaTiO
3
-SnO
2
thin films were deposited on SiO
2
substrate by ultrasonic spray method. SnO
2
shows no response to CO
2
while BaTi03-Sn02 gives response to 400 and 4000 ppm of CO
2
. These results are promising to continue working with this method.