Design of On-Chip Edge-Coupled Resonator and Its Application for Bandpass Filter in CMOS Technology

In this work, the design of a compact on-chip edge-coupled resonator is presented. To understand the insight of the presented resonator, a simplified LC-equivalent circuit model is provided, and electromagnetic simulation is utilized for performance optimization. To demonstrate the potential of the presented resonator, a bandpass filter design example is also given. By taking advantage of using metal-insulator-metal capacitors, a compact filter can be designed. For proving of concept, both the presented resonator and filter are implemented and fabricated using standard CMOS technology. A good agreement between simulation and measurement has been achieved. The measured results show that the filter has a resonance at 35.4 GHz with an insertion loss of 1.7 dB and greater than -10 dB of return loss. The miniaturized chip area of both the resonator and the BPF, excluding the pads, is only 0.039 mm
²
(0.15 × 0.26 mm
²
).