MEMS-Based Tunable Grating Coupler

We demonstrate a microelectromechanical-system-based tunable grating coupler capable of changing the central wavelength. The grating structure is fabricated on a suspended cantilever with supporting arms and can be tuned by an applied voltage. We demonstrate a tunable range of 22.8 nm under actuation voltages of up to 12 V in the present devices. In addition, we show that the supporting arms are critical components that can be used to effectively avoid the pull-in effect.