A silicon based metamaterial band-pass filter for terahertz communication system

A band-pass filter working in terahertz region has been experimentally proposed. The proposed filter has a 3dB bandwidth of 0.14THz and a Q factor of 3.1. The fabrication method is also proposed in this paper and this process is fit to the existing microelectronic processing technology. A comparative experiment was also carried out to further discuss the characteristic of the proposed filter.