AIN/Si Based SAW Resonators for Very High Sensitivity Temperature Sensors

In the current work we present AIN/Si based Surface Acoustic Wave (SAW) devices exploited as high sensitivity temperature sensors. The experimental results show that the resonance frequency varies between 3.2 and 5.5 GHz, depending on the finger/interdigit spacing width and metal thickness. The temperature measurements were performed between -250°C and +150 °C in a cryostat. The sensitivities were investigated between 24-150 °C and the values were compared to the results obtained for similar GaN/Si based SAW structures.