Tunable Manipulation of Microparticles by CMUT

We achieve trapping and aligning of microparticles by using a miniature capacitive micromachined ultrasonic transducer (CMUT) combined with a phononic crystal plate (PCP). The interaction of an incident wave generated by CMUT with the PCP at resonant frequency can result in periodic and gradient field near the surface of PCP. Then the microparticles on the surface of PCP suffer the acoustic radiation force and can be arranged regularly. Our observations show that the sound field generated by the CMUT device is feasible for particles manipulation.