Integrated Transmitting and Receiving Modality Graphene Microphone Array

Capacitive acoustic sensors are widely applied in different fields for the advantage of high sensitivity and integrated easily compared with piezoelectric ultrasound sensor. A graphene-based acoustic array with combination of sensing and actuating modality is proposed in this study. The array is divided into four 8×8 sub-arrays by horizontal and vertical lines in the middle part. The horizontal and vertical lines are designed for transmitting while the remaining sub-arrays are used for receiving the ultrasound wave. Related FEM simulation based on a two-dimensional axisymmetric sound-structure coupling model is performed to test the transmitting characteristics of graphene film. It shows that the graphene film, working in the actuating modality, has a maximum sound pressure of 4×10
^-4
Pa and sound pressure level of 24 dB at the central frequency of 50k Hz. The sound pressure level of far field shows that the directionality of proposed array is bidirectional.