A resonant frequency shift quartz accelerometer with 1st order frequency ΔΣ modulators for a high performance MEMS IMU

A novel acceleration transducer is fabricated utilizing a double-ended tuning fork (DETF) resonator combined at both ends of the DETF with a cantilever beam. In addition, a newly designed digital IP, which was inspired by pitch sensitive moiré patterns, was implemented in FPGA for fast and precise measurement of the resonant frequency. A quartz accelerometer prototype provides 67×10
^-6
(m/s)/√hr velocity random walk coefficient (0.16 μg/√Hz white noise) and 6.3×10
^-6
m/s
²
bias instability.