D-Band Compact and High Gain Pyramid Dielectric Antenna Array Using Silicon Technology

This paper presents an array of two Frustum Pyramid dielectric resonator antenna (DRA) based on a coplanar-waveguide (CPW) fed for D-band millimeter-wave application. The DRA takes the shape of a truncated apex pyramid. Fabrication of the Pyramid DRA is a two mask process. The fabrication process includes wet etching of high resistivity Si wafer using KOH solution along the crystalline surfaces to fabricate the pyramid like shape. The second mask is used to define the CPW feed network on the backside of the antenna. The compact-size and low profile of the Pyramid DRA make it great candidate for short-range wireless communication and high-resolution imaging. The simulation of the antenna array in the D-band shows a gain of 12.24dB and 82% radiation efficiency at 176 GHz.