Investigation of Polarization Hysteresis and Transient Current Switching in Ferroelectric Aluminum-Doped Hafnium Oxides

In this work, we investigated ferroelectric and antiferroelectric effects in ferroelectric HfAlO capacitor with various aluminum doping concentrations. With the increase of aluminum doping concentration, the transition from ferroelectric to weak anti-ferroelectric properties can be observed by measuring polarization hysteresis and transient current response. The experimental results prove that the aluminum doping concentration of HfAlO material not only affects the ferroelectric-antiferroelectric transition, but also determine the leakage issue during domain switching.