Dual-Mode Dual-Band Bandpass Filter Using Silicon Based MEMS Structure

In this paper, a dual-mode dual-band bandpass filter using silicon based MEMS structure is proposed, which allows two transmission paths to radio frequency (RF) signals. Each of them using dual-mode resonators results in respective passband. This filter is fabricated with two silicon layers. The two dual-mode resonators are fabricated in the middle layer and the feed network is fabricated on the top layer. This dual-band filter can provide convenience to easily change the feed-line length of the two bandwidths, while keeps only single input and output. Several attenuation poles in the stopband are realized to improve the selectivity of the proposed bandpass filter. The theoretical and measured results are presented and showed good agreement.