Ultra-Compact TSV-Based L-C Low-Pass Filter With Stopband Up to 40 GHz for Microwave Application

In this paper, an ultra-compact low-pass filter (LPF) with wide stopband is proposed based on lumped L-C structure in through-silicon via-based 3-D stacked configuration. The spiral inductor (L), interdigital capacitor (C), and the proposed LPF are theoretically analyzed based on parasitic parameters and equivalent circuit models. To evaluate the characteristics, the proposed LPF is simulated by HFSS, fabricated with CMOSprocess-compatible technology, and measured with de-embedding method. Simulation and measured results are in good agreement. Compared with the other literature, the proposed LPF has the most compact size of 0.028λ
_g
× 0.017λ
_g
. (λ
_g
is the guide wavelength at f
_c
.) With the cutoff frequency at 10.05 GHz, the filter has an insertion loss of 0.14 dB and reflection loss over 13 dB from dc to 9 GHz in the passband. The suppression levels are better than 20 dB from 20.4 up to 40 GHz in the stopband.