Optical Properties of Metal Sandwiched ZnO/Ti/Cu/Ti/ZnO Thin Film

Metal sandwiched ZnO/Ti/Cu/Ti/ZnO thin film systems were fabricated using magnetron sputtering technology and then annealed using a rapid thermal annealing (RTA) system at temperature from 100°C to 400°C. The surface morphologies, sheet resistance and optical properties of the thin film at different annealing temperatures were studied. The surface morphologies have little change with the annealing temperature rising. The sheet resistances of the thin films reduce with the annealing temperature increasing. Both the max transmittance and figure of merit increase with the temperature increasing from 100°C to 300°C and then reduce. Both of them reach the maximum values at 300°C which indicates that the metal sandwiched ZnO/Ti/Cu/Ti/ZnO thin film system annealed at 300°C has the optimal performance.