Femtosecond Laser Nano-Fabrication With Extended Processing Range

Superior performances, such as high processing speed and resolution, make galvano-mirror-based fabricating strategy widely applied, particularly for micro/nano-scale femtosecond laser direct writing (FsLDW). However, the optically limited processing area restricts its applications. Here, we report a simple, low-cost, and universal pre-compensation method that corrected the off-axis optical aberrations to considerably expand the processing area of galvano-mirror-based nano-FsLDW with 3D nano-resolution maintained. A high-quality continuous-surface Fresnel lens was one-step fabricated with a 550-μm diameter, which surpassed the effective range (~150-μm) of the high-numerical aperture objective lens used for high resolution. It provides a significant approach for novel high-speed/efficiency micro/nano-FsLDW of diverse micro/nano-elements/systems.