Spectral Response Optimization of Polycrystalline Black Silicon Solar Cell by Reactive Ion Etching Combined with PERC Technology

Reactive ion etching technology was combined with passivated emitter & rear cell technology to reduce the reflectance and transmittance of incident light and improve the spectral response of polycrystalline silicon solar cell. Preconditioning with acid solution can induce the formation of worm-like structures on the front surface, which could bring about the reduction of reflectance and enhancement of spectral response in the visible range. Optimization of the capping layer thickness on the rear side can enhance the internal reflection, which will decrease the transmittance and promote the spectral response in long wavelength range.