Fully Integrated, 406 $\mu$A, $\text{5 }^{\circ}$/hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope

In this paper, a complete system of a frequency-modulated gyroscope with digital output for future low-power, high-stability, and wide full-scale applications is presented. The system includes the microelectromechanical transducer, two analog oscillators, two mixed-signal frequency to digital converters, and a fundamental mixed-signal block for the real-time extraction and digitization of the demodulation phase reference. With an overall consumption of 406 μA, the system has a 90 dB dynamic range on a 50 Hz bandwidth, with a 5 °/hr stability after 20-min observation interval, and a scale-factor drift coefficient of 20 ppm/K only.