Dynamically stabilized high vacuum inside MEMS optical cells for atomic spectroscopy

Self-pumping high-vacuum MEMS optical cell for Cs/Rb atomic spectroscopy is presented for the first time ever. The MEMS alkali vapor cell and ion sorption micropump have been integrated forming unique, probably first in the World solution allows to generate high vacuum and introduce alkali atoms on chip. The vacuum level on 10
^-6
Tor r has been dynamically stabilized in the presence of rubidium vapors continuously introduced from solid-state dispenser. Achieved results opens a new possibility to fabricate new class of optical cells for atomic spectroscopy.