Si Waveguide Integrated Membrane Buried Heterostructure DFB Laser using SiN Multiple-Phase-Shift Surface Grating

We have demonstrated 32-Gbit/s direct modulation of Si waveguide integrated membrane buried heterostructure laser with 500-μm-long cavity, whose cavity consists of a multiple phase-shift grating to suppress the spatial hole burning effect. The optical output power was 9 mW at a stage temperature of 25 C.