High Voltage Power Amplifier for High Precision Mechatronic Systems

Mechatronic systems within industrial applications, e.g. semiconductor manufacturing equipment, require power amplifiers providing high power with high precision. Increasing voltage is favourable compared to increasing current to generate more output power due to limitations in system infrastructure. For this purpose, this research proposes a High Voltage power amplifier by applying a 5-level Flying Capacitor Resonant Pole Inverter (FC RPI). Moreover, trapezoidal filter inductor current, charge-based zero-voltage switching, and an elaborate output and filter current control scheme are added to the amplifier configuration. A model of a mechatronic system is used to generate a current setpoint waveform representing the load current for a single phase of a planar actuator generating forces in two directions. Time domain and spectral domain analysis are presented of the results obtained from the simulation platform constructed of the mechatronic, control and electrical systems. The obtained simulation results indicate proper functioning of the converter configuration, paving the way for future hardware implementation.