Characterization by GISAXS and Electrochemical Impedance Spectroscopy of porous oxide films

Porous oxide films were deposited by reactive sputtering. Some films received UV cures and/or a Si cap. The FTIR analyses show that the deposited films were very hydrophilic. Standard ellipsometric porosimetry was not able to determine porosity nor pore size. With GISAXS, the porosity of different films was determined (approximately 13%) and the pore format (mostly spherical pores with a radius of approximately 5 nm). Electrochemical Impedance Spectroscopy completed the pore analysis, indicating mostly open porosity. These techniques were sufficiently sensitive to show that the Si cap closed the pores somewhat while the UV cure increased the porosity.