Latch-up Model of Non-collinear PNPN Structures

A scalable I-V model for latch-up in non-collinear PNPN devices is adapted from a previous model for collinear SCR devices. The model is applied to 14-nm FinFET test structures. Layout scaling trends for key latch-up metrics, such as holding and trigger voltage, are captured by the model in circuit simulation. TCAD simulation is used to gain physical insight into the behavior of non-collinear PNPN devices.