Hyperspectral Time-Domain Terahertz Nano Imaging

We demonstrate hyperspectral imaging of the charge carrier profiles of doped precharacterized SRAM arrays in the THz frequency range 13 cm
^-1
-60 cm
^-1
using a s-SNOM. We are able to map free carrier concentration in range of 1016 cm
^-3
-1020 cm
^-3
with broadband THz source.