Development of Thin-Film Resistors Fabricated on an A1N Substrate for High-Voltage AC-DC Transfer Standards

The voltage dependence of ac-dc transfer differences occurs during step-up processes of over 300 V. The occurrence of voltage dependence may be partly due to Joule heating, which leads to changes in the resistance of the resistor and temperature dependence of the dielectric losses on the resistor coating. To reduce the voltage dependence of ac-dc transfer differences, thin-film range resistors with values ranging from 32 to 300 kΩ have been developed. For these thin-film range resistors, negligible voltage dependence has been observed at the voltage range from 100 to 1000 V.