Non-Conventional Diagnostics for Plasma Processing

For an optimization of plasma-based processes as thin film deposition suitable diagnostics are required. In addition to well-established plasma diagnostic methods (e.g. emission spectroscopy, mass spectrometry, Langmuir probes, etc.) we perform examples of “non-conventional” low-cost diagnostics which are applicable in technological plasma processes. Examples are the determination of energy fluxes by calorimetric probes
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and the measurement of momentum transfer due to sputtered particles by SPIN
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.