Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

Summary form only given. Micro-electromechanical systems (MEMS) have a broad area of application in modern technology. Nanostructured sensors allow the shrinkage of measuring systems to micrometer size (lab-on-a-chip). The authors present a micro-fabricated mass spectrometer equipped with a low pressure argon plasma source driven at a frequency of 2.45 GHz. An antenna creates a cylindrical shaped plasma volume of 250 μm in radius and 300 μm in height surrounded by borosilicate glass and electrically conducting silicon. Due to their invasive nature, many conventional techniques for characterization of technical plasmas, e.g. Langmuir probes, fail.