An Internal Model Based Iterative Learning Control for Wafer Scanner Systems

This work focuses on the model-free iterative learning control (ILC) design with good transient performance and fast convergence rate that is employed for precision control of a wafter stage. First, the experimental setup, the mathematical model, and the desired reference are introduced. Notice that the desired reference and its internal model (IM) are known in advance. Then, based on the internal model principle (IMP), a new ILC scheme, named as 1M-based ILC, is proposed by incorporating the 1M of the reference. The proposed 1M-based ILC is model-free, that is, independent on the system model of the controlled plant. The 1M -based ILC is carefully constructed to track the reference along the time axis while tracking/rejecting repetitive variations along the iteration axis. Precisely because of the tracking capability along the time axis in every iteration, the 1M-based ILC can achieve satisfactory performance even in the 0th iteration and improve the transient performance and the convergence speed. In addition, the 2-D
$H_{\infty}$
theory is used to establish the design criterion for the 1M-based ILC. Finally, in the experiments, the efficiency of the 1M-based ILC is illustrated by comparing with a P-type ILC and a model-based one.