Advanced micromechanical prototyping in polysilicon and SOI

The importance of achieving stable MEMS processes is discussed with particular reference to the DERA polysilicon sacrificial surface micromachining (SSM) and silicon-on-insulator (SOI) high aspect ratio micromachining (HARM) processes. DERA has recently made these processes available to universities through EPSRC and directly to industry. It has also formed a strategic partnership with a leading MEMS design software company, Microcosm Technologies, and is a founder member of its MEMS Services Partnership (MSP). These processes offer a route to fast, low cost prototyping and hence reduce the barriers to both small and large companies in terms of entry costs. Moreover, the ability to offer design services in qualified processes means that a lack of experience need no longer be a barrier to companies without previous experience of MEMS.